Sistemu Nsochapụ Vacuum Sistemu Nsochapụ Vacuum Dị Elu bụ igwe na-ewunye ígwè na fim dị mkpịrịkpịrị nke dielectric n'elu ihe ndabere ruo n'ijeri 300. Sistemu a na-eji isi mmalite magnetron sputtering nke ike ya si na redio frequency, ọkụ eletrik kwesịrị ekwesị (direct current) ma ọ bụ ọkụ eletrik kwesịrị ekwesị nke na-agagharị agagharị (pulsed direct current), na-arụ ọrụ n'ụdị otu ma ọ bụ n'ụdị nchikota-nkọwapụta. Nhazi modul na-eme ka nrụnye, mbupu, na nlekọta dịrị mfe. Ebe e wusiri ya bụ nkume igwe ndị a wụrụ nchịkọtajụ na oyi (cold rolled steel), e ji nkata igwe na-akpụzi ya ma sachaa ya spray, nwe okpokolo aluminum n'ime ya na mkpuchi acrylic na-egosipụta ìhè nke agba ntụntụ. Ihuenyo njikwa na-agbaso ụkpụrụ ergonomiki.
Aha oru ngo : Ultra High Vacuum Sputtering System, Aha ndị na-emepụta ya : Yong Zhang, Aha onye ahịa : Huaiyin Institute of Technology & Liaoning Petrochemical University.
Ihe ukwu a bu ihe nmeri nke mmeri ọla n’ile n’iche n’iru n’igwe na imeputa ihe n’igwe. Ga-ahụrịrị ihe nrịbaama ndị na-enweta ihe nzere ọla kọpa iji chọpụta ọtụtụ ihe ndị ọzọ, ọhụụ, ihe mbụ na okike na njikwa arụ ọrụ.
