Sistemu Nsochapụ Vacuum Sistemu Nsochapụ Vacuum Dị Elu bụ igwe na-ewunye ígwè na fim dị mkpịrịkpịrị nke dielectric n'elu ihe ndabere ruo n'ijeri 300. Sistemu a na-eji isi mmalite magnetron sputtering nke ike ya si na redio frequency, ọkụ eletrik kwesịrị ekwesị (direct current) ma ọ bụ ọkụ eletrik kwesịrị ekwesị nke na-agagharị agagharị (pulsed direct current), na-arụ ọrụ n'ụdị otu ma ọ bụ n'ụdị nchikota-nkọwapụta. Nhazi modul na-eme ka nrụnye, mbupu, na nlekọta dịrị mfe. Ebe e wusiri ya bụ nkume igwe ndị a wụrụ nchịkọtajụ na oyi (cold rolled steel), e ji nkata igwe na-akpụzi ya ma sachaa ya spray, nwe okpokolo aluminum n'ime ya na mkpuchi acrylic na-egosipụta ìhè nke agba ntụntụ. Ihuenyo njikwa na-agbaso ụkpụrụ ergonomiki.
Aha oru ngo : Ultra High Vacuum Sputtering System, Aha ndị na-emepụta ya : Yong Zhang, Aha onye ahịa : Huaiyin Institute of Technology & Liaoning Petrochemical University.
Ihe ukwu a bu ihe nmeri nke mmeri ọla n’iru n ’ulo, ulo na mpi n’ ulo oru. Ga-ahụrịrị ihe nrịbaama nke nenweta ihe nrịba ama nke ọla kọpa iji chọpụta ọtụtụ ihe ndị ọzọ, ihe ọhụụ, ihe okike na nke okike, ụlọ na arụpụta ihe eji arụ ọrụ.
